Transistor structure

ABSTRACT

A transistor structure is provided in the present invention. The transistor structure includes: a substrate comprising a P-type well, a gate disposed on the P-type well, a first spacer disposed on the gate, an N-type source/drain region disposed in the substrate at two sides of the gate, a silicon cap layer covering the N-type source/drain region, a second spacer around the first spacer and the second spacer directly on and covering a portion of the silicon cap layer and a silicide layer disposed on the silicon cap layer.

CROSS REFERENCE TO RELATED APPLICATIONS

This patent application is a continuation application of and claimspriority to U.S. patent application Ser. No. 12/502,239, filed on Jul.14, 2009, and entitled “Method of fabricating transistors and atransistor structure for improving short channel effect and draininduced barrier lowering,” the entire contents of which are incorporatedherein by reference

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method of manufacturing asemiconductor device, and a semiconductor structure thereof forimproving short channel effect and drain induced barrier lowering, andmore particularly, to a method of manufacturing MOS transistors, and aMOS structure thereof that improves short channel effect and draininduced barrier lowering.

2. . Description of the Prior Art

For decades, chip manufacturers have made metal-oxide-semiconductor(MOS) transistors faster by making them smaller. As the semiconductorprocesses advance to the very deep sub micron era such as 65-nm node orbeyond, how to increase the driving current for MOS transistors hasbecome a critical issue.

To attain higher performance of a semiconductor device, attempts havebeen made to use a strained silicon (Si) layer for increasing themobility of electrons or holes. For example, taking advantage of thelattice constant of SiGe layer being different from that of Si, a strainoccurs in the silicon layer growing on the SiGe layer. Since SiGe has alarger lattice constant than Si, the band structure of Si is altered,thereby increasing the mobility of the carriers.

Other attempts have been made to use germanium embedded in apredetermined source/drain region formed by selective epitaxial growthas a compressive strained silicon film to enhance electron mobility in aPMOS transistor, after a gate is formed. An SiGe layer deposited intothe predetermined source/drain region often increases the mobility ofelectron holes of PMOS, but will simultaneously decrease the electronmobility of an NMOS and reduce the efficiency of the transistor.Therefore, during SiGe layer formation, NMOS is usually covered by asilicon nitride layer serving as a mask. After the SiGe layer is formed,the silicon nitride layer will be removed by hot phosphoric acid.However, the surface of the substrate where the predeterminedsource/drain region of NMOS is disposed will be corroded by hotphosphoric acid. The interface between the gate dielectric layer and thesubstrate is taken as a reference. The baseline of corroded substratebecomes lower than the aforesaid interface. Therefore, after theimplantation process to form a source/drain region, the p/n junctionwill become deeper than a predetermined depth. As a result, shortchannel effect and drain induced barrier lowering (DIBL) effect willoccur.

Therefore, there is still a need for a MOS transistor device and amethod of manufacturing the same to improve problems mentioned above.

SUMMARY OF THE INVENTION

It is therefore an objective of the present invention to provide amethod of fabricating MOS transistors to solve the lowering of thebaseline where the predetermined source/drain region of NMOS is disposedafter removing a mask.

According to the present invention, a method of fabricating method offabricating transistors comprises the following steps. First, asubstrate comprising a first type well and a second type well isprovided. Then, a first gate on the first type well and a second gate onthe second type well are formed respectively. After that, a third spaceris formed on the first gate. Later, an epitaxial layer is formed in thesubstrate at two sides of the first gate. Next, a fourth spacer isformed on the second gate. Subsequently, a silicon cap layer is formedto cover the epitaxial layer, and the surface of the substrate at twosides of the second gate. Then, a first source/drain region is formed inthe substrate at two sides of the first gate. Finally, a secondsource/drain region is formed in the substrate at two sides of thesecond gate.

According to the present invention, a transistor structure for improvingshort channel effect and drain induced barrier lowering comprises: asubstrate comprising a P-type well; a gate disposed on the P-type well;a spacer disposed on the gate; a N-type source/drain region disposed inthe substrate at two sides of the gate; a silicon cap layer covering theN-type source/drain region; and a silicide layer disposed on the siliconcap.

The feature of the present invention is that, after forming theepitaxial layer, a silicon cap layer is formed at two sides of the gateof NMOS and PMOS respectively. In other words, the silicon cap layer isformed on the surface of the source/drain region of the NMOS and PMOS.The silicon cap layer can level up the baseline of the source/drainregion of the NMOS after the mask is removed. In this way, the shortchannel effect and the drain induced barrier lowering effect can beprevented because the depth of the p/n junction is maintained at apredetermined depth. Furthermore, the epitaxial layer will become aspacer of the NMOS after the epitaxial layer is formed.

These and other objectives of the present invention will no doubt becomeobvious to those of ordinary skill in the art after reading thefollowing detailed description of the preferred embodiment that isillustrated in the various figures and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 through FIG. 9 are schematic cross-section view diagrams showingthe means of fabricating transistors according to the present invention.

FIG. 10 shows a schematic cross-section view diagram of a transistorstructure for improving short channel effect and drain induced barrierlowering according to the present invention.

DETAILED DESCRIPTION

FIG. 1 through FIG. 9 are schematic cross-section view diagrams showingthe means of fabricating transistors according to the present invention.

As shown in FIG. 1, first, a substrate 10 comprising a first type well12 and a second type well 14 are provided. The first type well 12 may bean N type or P type, and the second type well 14 may be a P type or Ntype. The following illustration will take the first type well 12 as anN type well, and the second type well 14 as a P type well. In otherwords, a PMOS will be formed on the first type well 12 and a NMOS willbe formed on the second type well 14. In addition, a shallow trenchisolation (STI) 15 is disposed between the first type well 12 and thesecond type well 14, and around the first type well 12 and the secondtype well 14 within the semiconductor substrate 10.

Next, a first gate 16 and a second gate 18 are formed on the first typewell 12 and the second type well 14, respectively. The first gate 16includes a first dielectric layer 20 positioned on the substrate 10, afirst conductive layer 22 positioned on the first dielectric layer 20, afirst cap layer 24 positioned on the first conductive layer 22 and afirst spacer 26 positioned on the sidewalls of the first dielectriclayer 20, the first conductive layer 22 and the first cap layer 24. Thesecond gate 18 includes a second dielectric layer 28 positioned on thesubstrate 10, a second conductive layer 30 positioned on the seconddielectric layer 28, a second cap layer 32 positioned on the secondconductive layer 30 and a second spacer 34 positioned on the sidewallsof the second dielectric layer 28, the second conductive layer 30 andthe second cap layer 32. Generally, the first dielectric layer 20 andthe second dielectric layer 28 are composed of silicon dioxide, or amaterial with a high dielectric constant that is greater than 4. Thefirst conductive layer 22 and the second conductive layer 30 arecomposed of doped polysilicon, or a metal with specific work function.The first cap layer 24 and the second cap layer 32 are composed ofsilicon nitride. The first cap layer 24 and the second cap layer 32 canbe formed optionally. The first spacer 26 and the second spacer 34 arefor forming lightly doped regions of the drain/source regions. After thelightly doped regions are formed, the spacers may be kept in thestructure or removed. Next, the first gate 16 is taken as a mask to forma first lightly doped region 36 in the substrate 10 at two sides of thefirst gate 16.

After that, as shown in FIG. 2, a third spacer 38 is formed at thesidewall of the first gate 16. During the formation of the third spacer38, a mask layer 40 covering the second type well 14 and the second gate18 is formed simultaneously. The method of forming the third spacer 38and the mask layer 40 may includes the following steps. First, a siliconnitride layer is formed to cover the first type well 12, the second typewell 14, the first gate 16, and the second gate 18. Then, a patternedphotoresist (not shown) is formed to cover the second type well 14 andthe second gate 18. After that, the silicon nitride layer not covered bythe patterned photoresist is removed by an etching process to form thethird spacer 38. Finally, the patterned photoresist is removed. Thesilicon nitride layer originally covered by the patterned photoresistbecomes the mask layer 40.

Next, an epitaxial layer 42 is formed in the substrate 10 at two sidesof the first gate 16. According to a preferred embodiment of the presentinvention, the epitaxial layer 42 includes only a SiGe epitaxial layer44 as shown in FIG. 2. According to another preferred embodiment of thepresent invention, the epitaxial layer 42 includes both a SiGe epitaxiallayer 44 and a single crystalline silicon 46 formed on the SiGeepitaxial layer 44, as shown in FIG. 3. Preferably, the SiGe epitaxiallayer 44 can be formed by an embedded Silicon Germanium (e-SiGe)process. For example, the mask layer 40, the first gate 16 and the thirdspacer are taken as a mask to form two recesses at two sides of thefirst gate 16 by an etching process. After that, silicon-containing gasand germanium-containing gas flow into the chamber and the SiGeepitaxial layer 44 grows in the two recesses. According to anotherpreferred embodiment, the germanium-containing gas is turned off whenthe SiGe epitaxial layer 44 reaches a predetermined height. Then, thesingle crystalline silicon 46 can be formed on the SiGe epitaxial layer44. The thickness of the single crystalline silicon 46 can be adjustedaccording to product design, and the single crystalline silicon 46 caneven be omitted according to different requirements. Additionally, theconcentration of germanium in the SiGe epitaxial layer 44 can becontrolled to form a gradient in the SiGe epitaxial layer 44.

After the embedded Silicon Germanium (e-SiGe) process is finished, apatterned photoresist (not shown) is formed to cover the first type well12, the first gate 16 and the third spacer 38. Then, the mask layer 40is etched partly to form a fourth spacer 48 on the sidewall of thesecond gate 18. Next, the patterned photoresist is removed. According toanother preferred embodiment of forming the fourth spacer 48, the methodincludes the following steps. First, the third spacer 38 and the masklayer 40 are removed completely. Next, as shown in FIG. 5, a materiallayer 50 is covered on the second type well 14, the first type well 12,the first gate 16 and the second gate 18 conformally. As shown in FIG.6, a part of the material layer 50 is removed to form a seventh spacer52 and the fourth spacer 48. The process of forming spacers onlydemonstrates the preferred embodiment of the present invention. Othermodifications and alterations may be made by those skilled in thetechnology without departing from the spirit of the invention.

The following processes continue on from the process in FIG. 4, i.e. inthe following, the processes shown in FIG. 5 and FIG. 6 have not beenperformed.

As shown in FIG. 7, a silicon cap layer 54 is formed on the surface ofthe epitaxial layer 42 and the surface of the substrate 10 at two sidesof the first second 18. In other words, the silicon cap layer 54 isformed on the predetermined source/drain region in the first type well12 and the second type well 14. The silicon cap layer 54 can be singlecrystalline silicon. For example, the silicon cap layer 54 can be formedby using the same method as that used by the epitaxial layer 42. Thesilicon cap layer 54 can even be formed by putting the substrate 10 intothe same chamber as used by the epitaxial layer 42, and turning on thesilicon-containing gas again to form the silicon cap layer 54. Accordingto a preferred embodiment of the present invention, the thickness of thesilicon cap layer 54 is 50 to 150 angstroms.

As shown in FIG. 8, a patterned photoresist (not shown) covers the firsttype well 12. The patterned photoresist, the fourth spacer 48 and thesecond gate 18 are taken as masks to perform an implantation process.After the implantation process, a second lightly doped region 56 isformed in the substrate 10 at two sides of the second gate 18. Then, afifth spacer 58 and a sixth spacer 60 are formed on the sidewalls of thethird spacer 38 and the fourth spacer 48, respectively. After that, thefirst cap layer 24 and the second cap layer 32 are removed to expose thefirst conductive layer 22 and the second conductive layer 30.Subsequently, a P-typed first source/drain region 62 is formed in thesubstrate 10 at two sides of the first gate 16, and an N-typed secondsource/drain region 64 is formed in the substrate 10 at two sides of thesecond gate 18. At this point, the PMOS 66 and NMOS 68 of the presentinvention are completed. The fabricating sequence of the firstsource/drain region 62 and the second type source/drain region 64 can beexchanged. Additionally, the first source/drain region 62 may partlyoverlap with the epitaxial layer 42.

As show in FIG. 9, a silicide process is performed to transform at leastpart of the exposed first conductive layer 22, part of the exposedsecond conductive layer 30, and part of the silicon cap layer 54 tobecome a silicide layer 55. After that, other fabricating processes suchas forming a contact etch stop layer (CESL), a dual stress liner (DSL),or other stress memorization technology (SMT) can also be applied to thepresent invention to increase the performance of the MOS. Then, an intercircuit process can be performed on the PMOS and NMOS: for example,forming an inter layer dielectric covering the PMOS 66 and NMOS 68.Next, contact plugs can be formed in the inter layer dielectric tocontact the first gate 16, the second gate 18, the first source/draindoped region 62 and the second source/drain doped region 64. Inaddition, the present invention can also be applied to the embeddedsilicon carbon (e-SiC) to improve the performance of the NMOS. Forexample, when performing the process shown in FIG. 2 or FIG. 3, the SiGeepitaxial layer is replaced with a SiC epitaxial layer.

In the process mentioned above, at least part of the mask layer 40 willbe removed after the epitaxial layer 42 is formed. After removing partof the mask layer 40, the surface of the substrate 10 at two sides ofthe second gate 18 is also etched. Therefore, by taking the interface ofthe second dielectric layer 28 and the substrate 10 as reference, thebaseline of the surface of the substrate 10 at two sides of the secondgate 18 is leveled down. The feature of the present invention is thatthe silicon cap layer 54 is formed on the two sides of the first gate 16and the second gate 18. In other words, the silicon cap layer 54 isformed on the source/drain doped region of the PMOS 66 and NMOS 68. Forthe NMOS 68, the silicon cap layer 54 can refill the region of thesubstrate 10 that is etched along with the mask layer 40. In otherwords, the baseline of the substrate 10 at two sides of the second gate18 is leveled up. The short channel effect and drain induced barrierlowering effect can be prevented because the p/n junction is maintainedat a predetermined depth. For the PMOS 66, the silicon cap layer 54 isprimarily for the formation of the silicide layer 55. In addition, afterthe epitaxial layer 42 is formed, the mask layer 40 can be used as aspacer of the NMOS 68.

FIG. 10 shows a schematic cross-section view diagram of a transistorstructure for improving short channel effect and drain induced barrierlowering according to the present invention.

As shown in FIG. 10, the NMOS 168 of the present invention includes: asubstrate 100 comprising a P-type well 114, a gate 118 disposed on theP-type well 114, a spacer 150 disposed on the gate 118, a lightly dopedregion 156 disposed in the substrate 100 below the spacer 150, an N-typesource/drain region 164 disposed in the substrate 100 at two sides ofthe gate 118, a silicon cap layer 154 covering the N-type source/drainregion 164 and a silicide layer 155 disposed on the silicon cap layer154. The gate 118 includes a dielectric layer 128 positioned on thesubstrate 100 and a conductive layer 130 positioned on the dielectriclayer 128. In addition, the spacer 150 is a composite and the spacer 150includes spacers 134, 148, 160 positioned on the sidewall of the gate118. Furthermore, the thickness of the silicon cap layer 154 is 50 to150 angstroms, and the silicon cap layer 154 consists of singlecrystalline silicon. Moreover, the surface of the silicide layer 155 ismore elevated than the interface between the dielectric layer 128 andthe substrate 100.

As a result, the feature of the present invention is that a silicon caplayer 154 is at the source/drain region 164 of the NMOS 168. Therefore,the short channel effect and drain induced barrier lowering effect canbe improved.

Those skilled in the art will readily observe that numerousmodifications and alterations of the device and method may be made whileretaining the teachings of the invention. Accordingly, the abovedisclosure should be construed as limited only by the metes and boundsof the appended claims.

1. A transistor structure, comprising: a substrate comprising a P-typewell; a gate disposed on the P-type well; a first spacer disposed on thegate; an N-type source/drain region disposed in the substrate at twosides of the gate; a silicon cap layer covering the N-type source/drainregion; a second spacer around the first spacer and the second spacerdirectly on and covering a portion of the silicon cap layer; and asilicide layer disposed on the silicon cap layer.
 2. The transistorstructure of claim 1, further comprising a lightly doped region in thesubstrate below the spacer.
 3. The transistor structure of claim 1,wherein the thickness of the silicon cap layer is 50 to 150 angstroms.4. The transistor structure of claim 1, wherein the gate comprises adielectric layer on the substrate and a conductive layer on thedielectric layer.
 5. The transistor structure of claim 1, wherein thesurface of the silicide layer is more elevated than the interfacebetween the dielectric layer and the substrate.
 6. A transistorstructure , comprising: a substrate comprising a P-type well; a gatedisposed on the P-type well; a spacer disposed on the gate; a lightlydoped region in the substrate below the spacer: an N-type source/drainregion disposed in the substrate at two sides of the gate; a silicon caplayer covering the N-type source/drain region and the lightly dopedregion; and a silicide layer disposed on the silicon cap layer, andcovering only a portion of the silicon cap layer.
 7. The transistorstructure of claim 6, wherein the thickness of the silicon cap layer is50 to 150 angstroms.
 8. The transistor structure of claim 6, wherein thegate comprises a dielectric layer on the substrate and a conductivelayer on the dielectric layer.
 9. The transistor structure of claim 6,wherein the surface of the silicide layer is more elevated than theinterface between the dielectric layer and the substrate.